Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a013f27aee93b16ee05c95b0d161b734 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ee33b0e3e7398cf6fc957eeee59d510 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2202-08 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-602 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
filingDate |
2007-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5df1e0fcb919cdca5514b06645c5f10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0325387e5f6fda8e715b907e91a95e43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_575000bac169a5b4b037f2b7e67a2f81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_100e04d1e911a521633c8a3be85f33a8 |
publicationDate |
2008-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2008220182-A1 |
titleOfInvention |
Laser-based method for growing array of carbon nanotubes |
abstract |
A method for growing an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface; (b) forming a catalyst film on the first substrate surface; (c) flowing a mixture of a carrier gas and a first carbon source gas over the catalyst film on the first substrate surface; (d) focusing a laser beam on the second substrate surface to locally heat the substrate to a predetermined reaction temperature; and (e) growing an array of the carbon nanotubes on the first substrate surface via the catalyst film. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014192955-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014237557-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111381300-A |
priorityDate |
2006-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |