| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_87ee82e00702b9a890c6bca56cdf5130
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_67bb76895b0bbfc91c47c790d60e41d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e9032fd543bad52e0975235d3556cfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e83907f30a04bea5481a033923de2ed0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a4c9ffa7d1bdb4a171119f09b38d03b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_076cbbd11bbac26f14e6da523c888328
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0dbc0bbfefdb17bc8e9d05d9f5d20425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85e6fbf224da960e0eaf1607f17a04e8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08B37-0012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D105-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08B37-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469 |
| filingDate |
2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42558c49d3e3e5585fd20a2d61381034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_987e7b18672941dfba439460846b0b91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_267a71e7b0094713c5e82995b4dfd8a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_307adfa3004058204b0ba1df2891a7d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87e5ae68d708a6dda7489855b4750c1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae58a08b8d272e88b6c8e471bfe77b74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4329d41c3921ddc6c3d124a04ff5dba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5935eb505ee780eb6703dac65b15df26 |
| publicationDate |
2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008214018-A1 |
| titleOfInvention |
Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same |
| abstract |
A reactive cyclodextrin derivative or a reactive glucose derivative is used as a template derivative for forming an ultra-low dielectric layer. A layer is formed of the reactive cyclodextrin derivative or the reactive glucose derivative capped with Si—H and then cured in an atmosphere of hydrogen peroxide to form the ultra-low dielectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014004358-A1 |
| priorityDate |
2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |