| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a3855725684b3955505c2fe9cdf67f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38af443ae8800d9a277678bd628812bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_073e6e94e956f9f684d638c3b77bc8a5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0191
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41M3-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41M1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22 |
| filingDate |
2006-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e403f0846c1a1e657f0be6ba2476deef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_768a6e569b86749509c5c1a5e2c147b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e77a568a7b77497e8c7a7b44c8538be |
| publicationDate |
2008-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008190888-A1 |
| titleOfInvention |
Sub-Micron Decal Transfer Lithography Statement Regarding Federally Sponsored Research or Development |
| abstract |
The present invention provides a method of sub-micron decal transfer lithography. The method includes forming a first pattern in a surface of a first silicon-containing elastomer, bonding at least a portion of the first pattern to a substrate, and etching a portion of at least one of the first silicon-containing elastomer and the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9656502-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016023400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9356238-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015174940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10185218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828253-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021154732-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8948562-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015179938-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013140272-A1 |
| priorityDate |
2005-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |