| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75803ace4bcb9571c25b5a7112f471c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64ca8009b5daf093db15075fe6d5df8a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2008-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acb31e948eb736e9c41c0095d0970a6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82c29060da9e9a68e14f23ed1c6412a9 |
| publicationDate |
2008-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008188013-A1 |
| titleOfInvention |
In-situ dose monitoring using optical emission spectroscopy |
| abstract |
The present invention generally provides methods and apparatus for monitoring ion dosage during a plasma process. One embodiment of the present invention provides a method for processing a substrate comprising generating a correlation between the at least one attribute of the plasma and a dosage quantity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9764093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8963554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017076920-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010310791-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010216258-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102768967-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9717139-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581169-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009090616-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7977199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014031960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014154399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7713757-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8728587-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009195777-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009233384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104870992-A |
| priorityDate |
2007-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |