http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008176148-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate | 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d9f29072db6621ab596b0bcc58754cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29f0505f1cd4a9d63e5356bc9490d468 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eda5a8b4abb17f6991f37abe76bef888 |
| publicationDate | 2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2008176148-A1 |
| titleOfInvention | Method of making a grayscale reticle using step-over lithography for shaping microlenses |
| abstract | A method of fabricating a grayscale reticle includes preparing a quartz wafer substrate; depositing a layer of SRO on the top surface of the quartz substrate; patterning and etching the SRO to form an initial microlens pattern using step-over lithography; patterning and etching the SRO to form a recessed pattern in the SRO; depositing an opaque film on the SRO; patterning and etching the opaque film; depositing and planarizing a planarizing layer; cutting the quartz wafer into rectangular pieces sized to be smaller than a selected blank reticle; bonding the a piece a to selected reticle blank to form a grayscale reticle; and using the grayscale reticle to form a microlens array on a photoimager. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008197107-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7682761-B2 |
| priorityDate | 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.