| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8310d57730062302ee4f0e28b79fc43f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4598b3d59fda32e8a253a1460cde368c |
| publicationDate |
2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008160459-A1 |
| titleOfInvention |
Method of forming a pattern |
| abstract |
A method of forming a pattern comprising steps as follow. A substrate comprising a layer to be etched is provided. A first resist layer is formed on the substrate. The top of the first resist layer is patterned. A second resist layer is formed on the first resist layer being patterned. A portion of the second resist layer is removed. The first resist layer, the second resist layer, and the layer to be etched are etched. A fine pattern can be obtained using the method of the present invention, while the resist layer used is not too thin. Thus, the bad adhesion of the resist layer to the substrate and the less etch resistance of the resist layer for protecting underlying layers will not occur. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010040838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010183851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010308015-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010203299-A1 |
| priorityDate |
2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |