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publicationDate 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008159946-A1
titleOfInvention Laser-based method for growing array of carbon nanotubes
abstract A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first surface and a second surface opposite to the first surface; (b) forming a catalyst film on the first surface of the substrate; (c) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (d) generating a laser beam using a galvanometric scanning system, directing the laser beam toward/on one of the first surface and the second surface to locally heat the catalyst film to a predetermined temperature; and (e) growing an array of the carbon nanotubes from the substrate.
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