http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008156266-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32348 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 |
| filingDate | 2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_072a2a54b039814a40c3d721a96172ad http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b06e15f1298a950bfe09f37c87a758a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce58ad75e9637a861fbb903197ddf915 |
| publicationDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2008156266-A1 |
| titleOfInvention | Plasma processing apparatus |
| abstract | A clearance between a metal electrode and a sidewall portion (sidewall) of an approximately U-shaped dielectric is adjusted by, for example, partially inserting a heat insulator, a heat shield or an insulating material. Temperature difference in the Z direction (vertical direction) of the sidewall portion of approximately U-shaped dielectric is made smaller than temperature difference between front and rear sides at the bottom (bottom portion) of approximately U-shaped dielectric, to reduce warp in the Z direction of the sidewall portion of approximately U-shaped dielectric. This curbs warp in the Z direction of the bottom portion of approximately U-shaped dielectric coupled to the sidewall portion. The warp in the Z direction, which would be generated if the temperature difference only between the front and rear surfaces at the bottom were considered, can be curbed by utilizing the sidewall portion of approximately U-shaped dielectric. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610765-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017213707-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018096235-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11152196-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3059341-A1 |
| priorityDate | 2006-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.