| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_520278049ae6d5edd47f3440abdc5a27 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0076 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-28 |
| filingDate |
2005-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be50bf9dbe2e64a56ecd028ea940aad3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2251f9b2776e5d2830cf4949435989d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41bc497aa40ab87f242a2e8df8fa20bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c35cc0bdd4f5e1306ca9acd40f41a549 |
| publicationDate |
2008-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008144006-A1 |
| titleOfInvention |
Method for Measuring Topographic Structures on Devices |
| abstract |
In order to be able to measure topographies on wafers or devices in a fashion free from destruction, the invention provides a method for measuring three-dimensional topographic structures ( 22 ) on wafers ( 2 ) or devices in which with the aid of a confocal microscope ( 1 ) at least one fluorescing topographic structure ( 22 ) is scanned with excitation light, and the fluorescence light emitted from the focal point ( 17 ) in the focal plane ( 19 ) of the objective ( 15 ) and excited by the excitation light is detected, and measured data are obtained from the position of the focal point ( 17 ) and the detected fluorescence signal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110940288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020187123-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017191634-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010149546-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7124008-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7973940-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011000213-A1 |
| priorityDate |
2004-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |