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publicationDate 2008-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008107812-A1
titleOfInvention Precursors having open ligands for ruthenium containing films deposition
abstract Ruthenium containing precursors for ruthenium containing films deposition comprising a ruthenium precursor selected from the group essentially consisting of Ru(XOp)(XCp), Ru(XOp) 2 , Ru(allyl) 3 , RuX(allyl) 2 , RuX 2 (allyl) 2 , Ru(CO) x (amidinate) y , Ru(diketonate) 2 X 2 Ru(diketonate) 2 (amidinate) 2 , their derivatives, and any mixture thereof.
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