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publicationDate 2008-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008102018-A1
titleOfInvention Method of vaporizing solid organometallic compound
abstract A method of vaporizing a solid organometallic compound in which the method comprises filling the solid organometallic compound into a container, introducing a carrier gas to the container and taking out the gas containing the organometallic compound, wherein the solid organometallic compound is in the form of pellets and contains an inert support.
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