| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f7c39091c7abe9f5414c961dcb671b23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d953c721789bd580ca86791b5c963d30 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-051 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00142 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
2006-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bce0561264364d20341e736cd78246b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df9940876c2999edbc4eba00f8a45d1c |
| publicationDate |
2008-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008096301-A1 |
| titleOfInvention |
Micro electro mechanical system |
| abstract |
Embodiments of a micro electro mechanical system are disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9266717-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9890038-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758368-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9862594-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010242600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11174154-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010242603-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8629036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9580302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9172025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9327965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8220330-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8186221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011005317-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012187509-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10280074-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9105751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8546240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10132877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8307710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012024453-A1 |
| priorityDate |
2006-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |