| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05F3-00 |
| filingDate |
2007-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a65d59aa48cdeac764baa5c454b69768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_220f9a55a1fcbc7de3e71d1fbe031df4 |
| publicationDate |
2008-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008053816-A1 |
| titleOfInvention |
Plasma processing apparatus and method |
| abstract |
A plasma processing apparatus includes a plasma processing chamber and a source of microwaves. The microwaves are introduced to the processing chamber by a slotted annular waveguide having inner and outer arc-shaped slots. The distance between the centerline of the inner and outer arc-shaped slots is set to be an even multiple of a half wavelength of a microwave surface wave propagating along a surface of a dielectric window of the chamber. A distance between the centerline of the outer arc-shaped slot and an outer periphery of the dielectric window is set to be an odd multiple of the half wavelength of the microwave surface wave. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10780647-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8945342-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015170881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015125621-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018130638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012094494-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010216300-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8497214-B2 |
| priorityDate |
2006-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |