Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00 |
filingDate |
2007-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab9fd0e67049447b5c4db1f50f5e898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56 |
publicationDate |
2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2008044760-A1 |
titleOfInvention |
Positive resist composition and pattern formation method using the positive resist composition |
abstract |
A positive resist composition comprising: a resin which increases solubility in an alkali developing solution by an action of an acid and comprises a repeating unit containing a lactone structure and a cyano group and a repeating unit containing a first acid-decomposable group; a resin which increases solubility in an alkali developing solution by an action of an acid and comprises a repeating unit containing a lactone structure and a cyano group and a repeating unit containing a second acid-decomposable group which is different from the first acid-decomposable group; a compound which generates an acid upon irradiation of an actinic ray or a radiation; and a solvent. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I499866-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012052445-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040219-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012219903-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102385245-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8895223-B2 |
priorityDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |