patent/US-2008042260-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008042260-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c43d2904e1b632a9b19b072de8ea02a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a255ae22a344d3cb4bc724ca71c6611
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16235
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5769
filingDate	2007-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fce2c112d54633093af05f80733f9205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ef65369264a6a834f7c471e09b208f0
publicationDate	2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2008042260-A1
titleOfInvention	Micro-electromechanical systems device and manufacturing method thereof
abstract	A method of sealing and leading out an electrode for an MEMS device such as an angular velocity sensor, an acceleration sensor, or a combined sensor is provided. A fixed portion is formed within a device forming region surrounded with a base support, a beam is connected to the fixed portion, and a movable portion is connected to the beam. Further, a detection portion for detecting the displacement of the movable portion is disposed within the device forming region. An interconnection is connected to the movable portion and the detection portion, and the interconnection extends from the hermetically sealed device forming region to the external region at the outside. The interconnection penetrates the base support and is connected with the terminal. A hole is formed between the interconnection and the base support, and an insulating film is formed in the hole. The interconnection and the base support are insulated by an insulating film buried in the hole.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018059405-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9000543-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10071905-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010155865-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466532-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7905149-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9397151-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10384931-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7903313-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011018078-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009225387-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013285172-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009020419-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11675186-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9445536-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10473920-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022002144-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9478599-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785231-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8212326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013193527-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009127639-A1
priorityDate	2006-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541

Total number of triples: 46.