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publicationDate 2008-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008024563-A1
titleOfInvention Piezoelectric thin film element, ink jet head, and ink jet type recording apparatus
abstract A piezoelectric body (piezoelectric layer 14 ) is configured to include a first piezoelectric layer 14 a , a second piezoelectric layer 14 b , and a third piezoelectric layer 14 c . A piezoelectric constant of each of the first and third piezoelectric layer 14 a and 14 c is set to be smaller than that of the second piezoelectric layer 14 b . Thus, it is possible to reduce an internal stress generated at an interface between first and second electrode layers 13 and 15 corresponding to the first and third piezoelectric layer 14 a and 14 c , and generation of a crack caused by high voltage application or driving performed for a long time is expected to be greatly reduced.
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