| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_474c87ca1978e90d4fdea91932c7cc62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5d1df33810f23868939faf1f7f7d69a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_791fb4ce44749c96059be03e6220f88c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e8e07b4b01e95b63e1d31bb4504445b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13094df619a067acc0e3f8e79df6e823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e9d8398310e4ff61bbee9173c16a72c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_25cdd3a0400edd356e812d5344a45311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f1a9d3929098ae162af47cf081e031f4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2867
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-287
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-286 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2007-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e839b93ed29bc11404c15597d0511d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b494a5d9092c10a73e8f59bab1cec6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_393099f4c7ca056c0a9ee8c09cc2c361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d21679a1bd72e53bf44960b14f977eb5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_844432654bf57ebfe6bc872e02b74b04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4823323f991827b7d2960353da96d126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b9c8ede79e5580b7b3414cec2b416a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be02e1c83692a0ac15574c01f4cd0223 |
| publicationDate |
2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008018355-A1 |
| titleOfInvention |
Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method |
| abstract |
A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011095780-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11187752-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8638118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11719591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11300472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11543324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8400182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11693057-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014116434-A1 |
| priorityDate |
2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |