http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008001690-A1

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filingDate 2007-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_398566f9f685469c1204b8ab12d10857
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publicationDate 2008-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008001690-A1
titleOfInvention Micro scanner and manufacturing process, driving structure and driving method therefor
abstract A method for manufacturing a magnetic-induction element is provided. The method includes steps of: a) providing a substrate, b) forming an adhesive layer on the substrate, c) forming a seed layer on the adhesive layer, d) removing a part of the seed layer to reveal a part of the adhesive layer, e) partially forming a resistance on the seed layer and the revealed part of the adhesive layer, f) forming a magnetic-induction layer on the seed layer and the revealed part of the adhesive layer, g) removing the resistance, and h) removing a part of the substrate and the revealed part of the adhesive layer.
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