Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1296 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02502 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02488 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02691 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
filingDate |
2007-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d1735e9987d547f8729e853e6d32d4 |
publicationDate |
2007-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2007290200-A1 |
titleOfInvention |
Thin film semiconductor device, method of manufacturing the same and display |
abstract |
A method of manufacturing a thin film semiconductor device is disclosed. The method includes the steps of: forming a light reflection and absorption layer for reflecting and absorbing light on a substrate; patterning the light reflection and absorption layer in a prescribed shape; forming an insulating film covering the patterned light reflection and absorption layer; forming a semiconductor thin film containing a polycrystalline grain on the insulating film; and laser annealing the semiconductor thin film by irradiating pulse oscillated laser light to crystallize the semiconductor thin film. The laser annealing step includes a heating process, and a cooling process. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10535778-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014231813-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8952368-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10622484-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8816344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107170833-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102214697-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013099306-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013270538-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015079741-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011266542-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012138933-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11087981-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9263470-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9111797-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11024503-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9111803-B2 |
priorityDate |
2006-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |