| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60772301ea9e19083a3cd6904e072f5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ea688603790c25c2cda74b678918b1de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23edb52a5dfa3e2ee2717559bd14c12b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09C1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18 |
| filingDate |
2006-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786903f1a2f937c276db07bc2807299e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a39c90925f0a1b7970e2eed1f318b86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9308af66853d1d9009634b901e651d51 |
| publicationDate |
2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007251418-A1 |
| titleOfInvention |
Suspension of nanoparticles and method for making the same |
| abstract |
A stable suspension of ethylpolysilicate nanoparticles having a size of between about 5 nm and 120 nm are in water and stabilized with between about 0.05 and 5 weight percent tetraalkylammonium hydroxide. The particles are between about 95% and 99.5% hydrolyzed and have superior removal rates when used in chemical mechanical polishing. A process for making ethylpolysilicate nanoparticles includes the step of adding reverse osmosis water and 25% tetramethylammonium hydroxide and ammonium hydroxide to a reactor, agitating the mixture and heating the mixture to about 80° C. Tetraethylalkoxy silane is added to the mixture and the mixture stirred and hydrolyzed. Ethanol is then removed. The mixture was then subjected to a vacuum to remove additional distillate. The material left in the reactor was then transferred to a plastic drum. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8603318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9303190-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008041725-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011203940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9309442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9127187-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017525793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105658720-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009218542-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105658720-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935242-B2 |
| priorityDate |
2006-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |