| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_079c8950b9fb45cd7abd17ef94645ffa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b20c49c044b12b142e83d2008c20f6f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1aa2c66c301d880374ed5dedf575fa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_927dde09c82145f4f90329c23f7bcd36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34cb7d1097359268598bd53a90b4739e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2005-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f8b1a74b703edda8b0e485635565bb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5cbef6f0adfb7396be2111132a44c44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce6f5be4072279fda234290629a15e92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d25d7c7c2a9bf4e9e3a46252aac04422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_089199a3e9805253ce4577ba24f4201e |
| publicationDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007240637-A1 |
| titleOfInvention |
Thin-Film Forming Apparatus |
| abstract |
A thin-film forming apparatus is provided capable of forming a thin-film by bringing ions of some degree in plasma into contact with the thin-film. This thin-film forming apparatus comprises a plasma generator disposed at a position corresponding to an opening of a vacuum chamber for producing plasma in the vacuum chamber, a base plate holder for holding a substrate in the vacuum chamber, and an ion quencher disposed between the plasma generator and the base plate holder. When the plasma generator is projected directly onto the base plate holder, the projection image of plasma generator shielded by the ion quencher has an area smaller than the residual image of plasma generator projected onto the base plate holder. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127574-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018286645-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014150975-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013220548-A1 |
| priorityDate |
2004-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |