| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 |
| filingDate |
2007-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67d0a81c1e378e9a21a3840d080848f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf18a6ab5311f5fd215f34b6c2143886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866fe99d3c7d10788b7ce098d601c1b5 |
| publicationDate |
2007-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007236690-A1 |
| titleOfInvention |
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples |
| abstract |
A method for alignment of a chip in a substrate surface inspection is provided, in which a surface of a substrate including a chip formed therein is inspected by using a beam. The method is characterized in comprising: a step of placing the substrate so that the chip is positioned within a field of view subject to the inspection; a step of measuring a magnification for the detection when the chip is positioned within the field of view subject to the inspection; a step of calculating a size of position error of the chip based on the measured magnification for the detection; and a step of compensating for the position of the chip based on the calculated position error. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8502553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011215826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240041-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013322735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012028389-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8513065-B2 |
| priorityDate |
2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |