| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q17-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q17-2233 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-14 |
| filingDate |
2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b22832a5708b47fb6195af3a2ad8176 |
| publicationDate |
2007-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007229853-A1 |
| titleOfInvention |
Nanometer contact detection method and apparatus for precision machining |
| abstract |
A method and apparatus for determining the distance between the tip of a machining tool formed of a substantially transmissive material and a surface. A beam of narrow bandwidth light is diffracted by directing the beam of narrow bandwidth light between the surface and the tip of the machining tool such that a portion of the diffracted beam is optically coupled into the machining tool via near-field optically coupling. The power of the portion of the diffracted beam optically coupled into the machining tool is measured. The distance between the tip of the machining tool and the surface is then determined based on the measured power. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9242361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8755055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103968770-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9415488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10245716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11498180-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007035311-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10702927-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104942652-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8925931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10792801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11045919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10710206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9539647-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8915499-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10124461-B2 |
| priorityDate |
2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |