| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2007-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12ff528426693bcd728f5ed0fa2fbb99 |
| publicationDate |
2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007224550-A1 |
| titleOfInvention |
Photosensitive composition and method for forming pattern using same |
| abstract |
The photosensitive composition of the invention contains a polymer material having a group having a structure represented by following general formula (2), and a photo acid generator generating acid with an ultraviolet ray or an ionizing radiation n nwherein m represents an integer of 0 or more. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009081582-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2375287-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7871755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I417656-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009208866-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102236254-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7871754-B2 |
| priorityDate |
2004-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |