http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007218629-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-036 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2006-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ae67221964ac5a3ddfd5f604c5bc20c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dfb3746c9abd194427f0a02a764ab35 |
| publicationDate | 2007-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2007218629-A1 |
| titleOfInvention | Method of fabricating an integrated memory device |
| abstract | Method of fabricating an integrated memory device including the steps of providing a semiconductor substrate, including an array region and a support region; providing GC-lines in said array region and in said support region, wherein the GC-lines in said support region have a first height; providing in the array region bit line contacts projecting above said GC-lines, wherein said bit line contacts have a second height being higher than said first height; providing a first isolation layer, the maximum height of said GC-lines in said support region including the coverage of said first isolation layer being lower than said second height; providing a second isolation layer on said first isolation layer; and polishing said first isolation layer and said second isolation layer, such that a planar surface of the integrated memory device is provided and such that said bit line contacts are exposed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110223982-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10763264-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10453849-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9825031-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636671-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019273083-A1 |
| priorityDate | 2006-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.