| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2007-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7473073dadbeac4aea2675cd36898ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cbafd387053e7b3cd4a01fe52735ed9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe5efe4c42606f7a2ce7a1be4be1a19 |
| publicationDate |
2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007175587-A1 |
| titleOfInvention |
Method of generating discharge plasma |
| abstract |
A pulse voltage is applied on a process gas to generate discharge plasma. The pulse voltage has a duty ratio controlled in a range of 0.001 percent or more and 8.0 percent or less. Preferably, the discharge plasma has an electron density of 1×10 10 cm −3 or larger and an electron temperature of 1.5 eV or lower at a supplied power of 1.0 W/cm 2 or more per a unit area of a discharge electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008217562-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10145007-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2107592-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112689374-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2107593-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9217195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009087796-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2042922-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9972476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2042922-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008122368-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012233257-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010084577-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011274852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7807961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7914692-B2 |
| priorityDate |
2006-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |