| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24f54aefd7a75822ce9d6a7759e20068 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2245-17 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-088 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 |
| filingDate |
2004-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ccb75c58684671b54f1b81a4369d38c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3debe2fa527cd4b1f661266f07c37866
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bab2d1618c72eb785ae423cdbdbf0e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2e86366c22b2cc501182882a2d97fbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1fc7a58c8ed6347b8faca15623e4c1 |
| publicationDate |
2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007119828-A1 |
| titleOfInvention |
Plasma generating electrode, its manufacturing method, and plasma reactor |
| abstract |
A plasma generating electrode 1 includes at least two plate-shaped unit electrodes 2 each of which faces each other and is capable of generating plasma upon application of a voltage between the unit electrodes 2, at least one of the unit electrodes 2 each of which faces each other including a plate-shaped ceramic dielectric 3 having a plurality of grooves 5 and/or a plurality of recesses 6 formed in at least one surface, and a conductive film 4 disposed inside the ceramic dielectric 3, the plasma generating electrode 1 capable of generating high-density plasma at edges 9 formed by a surface 21 of the ceramic dielectric 3 and side surfaces 22 of the grooves 5 and/or the recesses 6 upon application of a voltage between the unit electrodes 2, the high-density plasma having a density higher than that of plasma generated between the unit electrodes 2 in an area other than the vicinity of the edges 9. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9386678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9960011-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9734990-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3389345-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014117834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013255575-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11352696-B2 |
| priorityDate |
2003-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |