| abstract |
A method of producing a silicon carbide sintered body for heaters, which contains 500 ppm or more of nitrogen, including obtaining slurry-like mixed powder obtained by dispersing silicon carbide powder in a solvent; obtaining a green body by pouring the mixed powder in a shaping die followed by drying; first heating step of heating the green body under a vacuum atmosphere up to a temperature in the range of 550 to 650° C.; and second heating step of, after further heating to a temperature equal to or higher than 1500° C. under a nitrogen gas atmosphere, holding at the temperature under the nitrogen gas atmosphere to obtain a silicon carbide sintered body. And a silicon carbide sintered body for heaters, which has a nitrogen content of 500 ppm or more and the porosity of 32% by volume or less. |