| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47666899afde960d447fa21e49dc5dd2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de2974e05a713b37979eb5ff9a8fe51a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0ffc5b7fdc7107f8efea59ce967d4d5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2887 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02 |
| filingDate |
2007-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a102382e7fb8ebaf59d5441c52b2213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b4ed65b9168a3c78800d38606f4d42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc069720f30cf133959487e9500b716d |
| publicationDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007115013-A1 |
| titleOfInvention |
Chuck with integrated wafer support |
| abstract |
An improved chuck with lift pins within a probe station. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010314552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8143595-B2 |
| priorityDate |
2003-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |