| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_596f7ae3e79bc578e17a444424a1dee6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N1-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0096 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00 |
| filingDate |
2005-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38299f887f7ebc6d56fd8e1f8bc46dd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a33a5a39edf93e94ace4653d74afddd9 |
| publicationDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007114882-A1 |
| titleOfInvention |
Anti-stiction gas-phase lubricant for micromechanical systems |
| abstract |
One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109153562-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8134772-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7944600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011058247-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009231667-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7880952-B2 |
| priorityDate |
2005-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |