Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
filingDate |
2005-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6ea02c1bb391313ea4aae55e455fd3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7eb213879a3d808876e13769e95d55d7 |
publicationDate |
2007-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2007111535-A1 |
titleOfInvention |
Method to create damage-free porous Low-k dielectric films and structures resulting therefrom |
abstract |
Low dielectric constant dielectric films having a high degree of porosity suffer from poor mechanical strength and can be damaged during processing steps. Damage can be substantially eliminated or minimized by stuffing the pores of the dielectric film with a material that substantially fills the pores. The stuffing material should have low surface tension and viscosity to provide good wetting. Alternatively, the stuffing material can be dissolved in a wetting carrier fluid, such as supercritical carbon dioxide and the like. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9117666-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010308383-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9653400-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8927430-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014353802-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013017682-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9054052-B2 |
priorityDate |
2005-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |