http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007109007-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_af2a54ef138604c5b43bc962f5efd4bf |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2648 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2005-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cc6359401cec9f19065ba5b1696cf55 |
| publicationDate | 2007-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2007109007-A1 |
| titleOfInvention | Elastic metal gate MOS transistor for surface mobility measurement in semiconductor materials |
| abstract | A semiconductor wafer or sample having a substrate of semiconducting material is tested by compressing a dielectric between three electrically conductive contacts and a top surface of the semiconductor wafer or sample substrate. The dielectric has a thickness that permits tunneling current to flow therethrough without damaging the dielectric. A first electrical bias is applied to a pair of adjacent contacts and a second electrical bias, such as ground reference, is applied to the other contact whereupon an inversion layer forms in the semiconductor wafer or sample. A value of a current that flows in the semiconductor wafer or sample substrate and across the dielectric, in the form of a tunneling current, is measured in response to the applied electrical biases. A surface mobility of minority carriers in the semiconductor wafer or sample is determined as a function of the applied electrical biases and the value of the measured current. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101684149-B1 |
| priorityDate | 2005-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.