| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H3-00 |
| filingDate |
2006-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85774d81690f1daaeebb5d7a7322898f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_852706c9d028080161d30e8c665e18c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9488f9c9c7cacdb7d24865c3b670f1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc3091c084c37b727948361d729c13c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2726ad1bb1ef8fd6568e3bb4ae1b627
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9e1da9fe889e9d95b0ddab94d226c7f |
| publicationDate |
2007-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007102303-A1 |
| titleOfInvention |
Method and composition for electrochemically polishing a conductive material on a substrate |
| abstract |
Polishing compositions and methods for removing conductive materials from a substrate surface are provided. The method includes providing a substrate comprising dielectric feature definitions, a barrier material disposed in the feature definitions, and a bulk conductive material disposed on the barrier material in an amount sufficient to fill feature definitions; polishing the substrate to substantially remove the bulk conductive material; polishing a residual conductive material to expose feature definitions, comprising: applying a first voltage for a first time period, wherein the first voltage is less than the critical voltage; and applying a second voltage for a second time period, wherein the second voltage is greater than the critical voltage. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009239379-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009227115-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8974655-B2 |
| priorityDate |
2005-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |