http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099397-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
filingDate 2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad2471182fbe7d11a9b247c32093c1de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4e0bfc24224d455cc1fc3a1f92d6fd9
publicationDate 2007-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2007099397-A1
titleOfInvention Microfeature dies with porous regions, and associated methods and systems
abstract Microfeature dies with porous regions, and associated methods and systems are disclosed. A method in accordance with one embodiment of the invention includes forming a porous region between a die and a remainder portion of a microfeature workpiece, and separating the die from the remainder portion by removing at least a portion of the porous region. For example, the die can be removed from the remainder portion by making a cut at the porous region (e.g., with a rotating saw blade), etching material from the porous region, or directing a water jet at the porous region. In other embodiments, a porous region of the microfeature workpiece can receive conductive material to form a conductive pathway (e.g., a line and/or via) in the workpiece. In still further embodiments, the porous regions of the workpiece can be formed electrolytically with electrodes that are spaced apart from the workpiece and/or support relative movement between the electrodes and the workpiece.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017084482-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012110603-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8906782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015044856-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013115757-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10700012-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103094169-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103094206-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9368404-B2
priorityDate 2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5300155-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6722950-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6504247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6051496-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6848970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004023447-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003054729-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6214716-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6736952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7045015-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6024856-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004043705-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6218309-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6063306-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5107328-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6368184-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6188232-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002052126-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6564979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6046099-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6174425-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6039633-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6171467-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003064669-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5098533-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6068787-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6066559-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6060395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6856023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5897375-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5888866-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5863307-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6033953-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6395607-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5883426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6225651-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6187651-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6197182-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5618381-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3239439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006043534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005059324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004087441-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6551935-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6206756-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6846227-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6893328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4138304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6689258-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915

Total number of triples: 92.