| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbd85f1a203ffea758569aa6e7bdf373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03a986af7cf85becdaf8d41eebf02371
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1f4e1464dc4881a0d30b2c181a0cec9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_331fa10a687ae3e82c908a7a2d8c94c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0bedfe9b1315a0d0c9b43cce6a2f4104 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24J3-00 |
| filingDate |
2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7e56b985dfe266433e32731c92b5e16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd644a239b5e7c1bf502699534ac210c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22f3b991fff95e4c81250a63608f957a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1a701591da83d0e53d06de6c241fc23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d725cd6dcf0ca1e1bd784f9029a38a1f |
| publicationDate |
2007-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007082313-A1 |
| titleOfInvention |
Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit |
| abstract |
A wafer holder less susceptible to deformation even under high load and having high heat-insulating effect and hence capable of improving positional accuracy, improving thermal uniformity and rapid heating and cooling of chips, as well as a heater unit including the wafer holder and a wafer prober including the heater unit are provided. The wafer holder includes a chuck top having a chuck top conductive layer on its surface and a supporter supporting the chuck top, and has a support member in a space between the chuck top and the supporter. Preferably, the support member is arranged concentric with the supporter or approximately at the center of the supporter, and more preferably, support members arranged concentrically and arranged at the center are both provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8409743-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009142628-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017248632-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10161667-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009142653-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11280827-B2 |
| priorityDate |
2005-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |