| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T436-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T436-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T436-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate |
2006-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f01b0c63a7a698c0f892e61998b04a11 |
| publicationDate |
2007-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007065345-A1 |
| titleOfInvention |
Manufacturable single-chip hydrogen sensor |
| abstract |
A robust single-chip hydrogen sensor and a method for fabricating such a sensor. By utilizing an interconnect metallization material that is the same or similar to the material used to sense hydrogen, or that is capable of withstanding an etchant used to pattern a hydrogen sensing portion, device yields are improved over prior techniques. |
| priorityDate |
2000-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |