| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a45d675734ed23b89a413ec6d486a4c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cc479c59556afb920e28adf7178524c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76844
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate |
2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90a92ffe4f28eadebd1abf2d66d371ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_774a7035fc84fe18709f5faf3c78d302 |
| publicationDate |
2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007052098-A1 |
| titleOfInvention |
Metal line for a semiconductor device and fabrication method thereof |
| abstract |
A metal line, which can be used in a semiconductor device structure less than 65 nm in size by forming a barrier metal of an anti-diffusion layer for a copper line using CVD TiSiN, and a fabrication method thereof are provided. The metal line includes: a semiconductor substrate having a semiconductor device formed thereon; an insulating layer which has a contact hole at a portion corresponding to the semiconductor device and is formed on the semiconductor substrate; a TiSiN barrier metal layer which is formed in the contact hole; and a copper line which is formed on the TiSiN barrier metal layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106158730-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3049432-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2017243061-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017168098-A1 |
| priorityDate |
2005-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |