| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_331fa10a687ae3e82c908a7a2d8c94c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03a986af7cf85becdaf8d41eebf02371
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0bedfe9b1315a0d0c9b43cce6a2f4104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1f4e1464dc4881a0d30b2c181a0cec9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02 |
| filingDate |
2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_085244f6a91d8b74a88818a0f03ad955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fac50f35c1b0ab6d82b49e4de4f9950e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_953fe1a6c03b0c49a7ecad4b3cdafee3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3187bf39df031c07ac1388484db5d039 |
| publicationDate |
2007-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007046306-A1 |
| titleOfInvention |
Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit |
| abstract |
A wafer holder and a wafer prober including the same are provided in which the positional accuracy of the wafer holder is very high when the wafer holder is moved to a prescribed position in probing, and the positional accuracy are less likely to vary even with repeated movements. The wafer holder in accordance with the present invention includes a chuck top having a chuck top conductive layer on a surface thereof and a support body supporting the chuck top. The weight of the wafer holder is 28000 g or less. Preferably, the weight of the chuck top is 6000 g or less. Preferably, the weight of the support body is 12000 g or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006186904-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112462221-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7855569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I735914-B |
| priorityDate |
2005-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |