| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_331fa10a687ae3e82c908a7a2d8c94c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1f4e1464dc4881a0d30b2c181a0cec9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03a986af7cf85becdaf8d41eebf02371
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0bedfe9b1315a0d0c9b43cce6a2f4104 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
| filingDate |
2006-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07aac8b7a1307e14a982a27d97d70f42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91211ae330df431c0071f1f78856166f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28ec43d4a6254222df3a8560378b9ad7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ad007e2fef1941ca861ed9df90627f7 |
| publicationDate |
2007-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007045778-A1 |
| titleOfInvention |
Wafer holder, heater unit used for wafer prober having the wafer holder, and wafer prober having the heater unit |
| abstract |
A wafer holder for a wafer prober, a heater unit including the same, and a wafer prober including the heater unit are provided in which deformation or breakage of a chuck top can be prevented and proper measurement can be realized even in repeated use. A wafer holder in the present invention includes a chuck top having a chuck top conductive layer on a surface thereof and a support body supporting the chuck top. The chuck top and the support body are fixed to each other by a screw. The difference of thermal expansion coefficient between the screw and the chuck top is 5.0×10 −6 /K or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3223305-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012038384-A1 |
| priorityDate |
2005-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |