http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007043474-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97411dac2a9aceddcf1140e97aad0a57 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B13-026 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B21-00 |
| filingDate | 2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_729590f92b60106591ec164f4990baa2 |
| publicationDate | 2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2007043474-A1 |
| titleOfInvention | Systems and methods for predicting process characteristics of an electrochemical treatment process |
| abstract | Methods and systems for managing a process for electrochemically treating a surface of a microfeature workpiece in an electrochemical treatment chamber that includes a processing unit for receiving a first processing fluid separated by an ion-permeable barrier from an electrode unit for receiving a second processing fluid are described. The methods and systems provide the operator the ability to effectively troubleshoot, evaluate, and modify electrochemical treatment processes so that effective results can be achieved and cost savings realized. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006032758-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7628898-B2 |
| priorityDate | 2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.