| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-318 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate |
2006-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7d0a2330005cca2437e27a8ffc8abdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ff16dde8ee2fbde449f02e53bf3ba66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e3ec3f94fc6ad5c5514587c16dd1663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20e64f1c50ab98b28b49a9242add1fb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f93935e012c4aa76d4c8164ea864ca67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed82b4aac71cff8042003d0f1ff2e10e |
| publicationDate |
2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007040203-A1 |
| titleOfInvention |
Semiconductor device capacitors with oxide-nitride layers and methods of fabricating such capacitors |
| abstract |
Capacitors having upper electrodes that include a lower electrode, a dielectric layer and an upper electrode that includes a conductive metal nitride layer and a doped polysilicon germanium layer are provided. At least part of the conductive metal nitride layer is oxidized and/or at least part of the dielectric layer is nitridized. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102406971-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006270177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113284900-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8980722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10879248-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019189615-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106971937-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009200640-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8497492-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017186752-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170075975-A |
| priorityDate |
2005-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |