http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007039385-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_84b65f0d54dc1528eced1f93d72c3a50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6663476ca9c6ece6d3f5a73717285a0d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-121 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2005-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e210080272a35d9bbe41c76e9da9b3e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87842b08e9200c1381fe4e4ff5c799a6 |
| publicationDate | 2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2007039385-A1 |
| titleOfInvention | Resistive thin film humidity sensitive device based on silicone-containing copolymer and its preparation method |
| abstract | Disclosed is a resistive thin film humidity sensitive device based on silicone-containing copolymer and its preparation method. The device includes a microlite glass substrate; a plurality of interdigital gold electrode pairs, which are evaporated and photolithographically defined onto the microlite glass substrate; lead lines connecting to the interdigital gold electrodes; and a humidity sensitive film coated onto the microlite glass substrate and surface of the interdigital gold electrodes, and the humidity sensitive film is a cationic polyelectrolyte-silicone containing copolymer. The method for preparing the device includes the steps of: (1) dipping a microlite glass substrate having interdigital gold electrodes in a solution containing humidity sensitive materials by a Dip-Coater, and obtaining a humidity film after lifting and heat treatment; and (2) aging the interdigital gold electrodes coated with humidity sensitive film on microlite glass substrate at a specific electric condition, humidity and temperature condition, and obtaining the resistive-type thin film humidity sensitive device based on silicone-containing copolymer. Advantages of the present invention include broad humidity detection range, high sensitivity, fast response speed, simple process for production, low cost, and is widely applicable to detection and control of a process and environmental humidity. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10670548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10352726-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016069831-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112924316-A |
| priorityDate | 2005-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.