Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cc004a441c17bdef2d92945b8042bdc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
filingDate |
2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87c927b81a30be283acdfcd4ae4ee683 |
publicationDate |
2007-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2007037391-A1 |
titleOfInvention |
Atomic layer deposition of metal-containing films using surface-activating agents |
abstract |
Atomic layer deposition processes for the formation of metal-containing films on surfaces are provided. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9938151-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7939932-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10533023-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008315334-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8323736-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008248648-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831094-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8163341-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014230733-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3013997-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010124609-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016118262-A1 |
priorityDate |
2005-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |