http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007037372-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d4d4e98af171f40b2a3519926be49db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb4c0aff7081cc3890ba2d4251623f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c3e88153a6ef0da48cc5eed859fac22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffbbb93a7eca92083a43240df9ef9252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be2daa84607761102f9a9a992ea821d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d59dc404a0c2d83299eabb63ae10740
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4055c19995db39ddbff9f1891e37a4da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f246daa82851ebb2db0ecaea4eed55d5
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7843
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
filingDate 2006-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_483eaa1251652169dd3ca7b3da0ebdff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a6be2bb3eb060c1c7bb8991c0a3b3ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd3468de7271923a43997e666ec9ae5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94f8dcf5340a729ab2240c74129a4abe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_143a82e1cf063d0f702074b3a51b5a88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_850c6d16c9bc03a800d72dde916fec34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_013477d79b6ac13d0469bd360ab27ced
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f9e309298e1d05a5f5ce797b35fd35f
publicationDate 2007-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2007037372-A1
titleOfInvention Planarizing a semiconductor structure to form replacement metal gates
abstract A sacrificial gate structure, including nitride and fill layers, may be replaced with a metal gate electrode. The metal gate electrode may again be covered with a nitride layer covered by a fill layer. The replacement of the nitride and fill layers may reintroduce strain and provide an etch stop.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7572704-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289481-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8384165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010059801-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9960160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008308882-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014001566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8237205-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012220113-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012244669-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008160737-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8574990-B2
priorityDate 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005116360-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7126198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004224450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004259324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6211026-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006183277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005035455-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005145894-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6235568-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158731258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166703
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453357195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4389803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448362446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426223773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426031689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452441329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161922877
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9837110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450042639
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4227894
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454232550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452894838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453621816
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449693299
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161827978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545753
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454092735

Total number of triples: 101.