| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_35f6221c19b77327c0a8e49786d19b37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_369e0a571a804d3c59c6f7ec2b1d4a37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-84 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00 |
| filingDate |
2005-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa37820efd5b2351695a4829f38cf622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a56ee941660f8a539e7262a98ff81058 |
| publicationDate |
2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006292458-A1 |
| titleOfInvention |
Method of creating photo mask data, method of photo mask manufacturing, and method of manufacturing semiconductor device |
| abstract |
A method of creating photo mask data includes preparing design data of a photo mask, generating drawing data of the photo mask by using the design data, generating inspection control information configured to control inspection of defect on the photo mask by using the drawing data, and generating drawing and inspection data including the drawing data and the inspection control information by providing the drawing data with the inspection control information. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007207393-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012100280-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009119635-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8223403-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007285728-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009046280-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007178407-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7742162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7642034-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8455039-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009274828-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8113144-B2 |
| priorityDate |
2004-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |