| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd2d353c8da763977ad2d333de83ec12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4db44cab732eb81c0425991deab7466c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5fd211ecfb72caa4a13a45310c5f0207 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58 |
| filingDate |
2005-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3bf96e39b1766bab2a4f82e4b36ad17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d7e24f1d476f6ae4f454b8ecf199b97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19d466518b9528559f0a04c4f7968ccb |
| publicationDate |
2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006289966-A1 |
| titleOfInvention |
Silicon wafer with non-soluble protective coating |
| abstract |
A silicon wafer with an array of integrated circuit (IC) dies formed on the wafer is provided with a protective coat applied to a surface of the wafer to protect the IC dies from debris created during a laser scribing process. The IC dies can include die bumps that can be adversely affected by debris from the laser scribing process. The protective coat is a tape or a film that may be optically transparent, chemically non-reactive to the laser energy and formed of material that can be ablated by the laser scribing. The protective coat is removed from the IC dies after laser scribing leaving the IC dies and die bumps clean of any debris, thereby decreasing the number of defective dies. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015037915-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I623060-B |
| priorityDate |
2005-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |