| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58b93ffe5e3a7d968fbe62732e28303b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2006-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b661b9fcf179e26141ce4ced908dd6ff |
| publicationDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006286815-A1 |
| titleOfInvention |
Interlayer insulating film formation method and film structure of interlayer insulating film |
| abstract |
An interlayer insulating film formation method for forming an interlayer insulating film on a substrate includes the step of forming the interlayer insulating film through plasma CVD by using an organic silicon compound including no oxygen atom and an organic silicon compound including an oxygen atom as materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102268645-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8673408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009042403-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2392412-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011171775-A1 |
| priorityDate |
2005-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |