| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f50f95c17e4934fb9f9810574cdf87aa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2005-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf30c9d5c076a792ba34eed2633e9dda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce807735e71020c4ea0c3ecad7e146cf |
| publicationDate |
2006-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006275931-A1 |
| titleOfInvention |
Technology of detecting abnormal operation of plasma process |
| abstract |
A method of detecting abnormal operation of a plasma process, includes: (i) detecting a potential Vpp 1 between an upper electrode and a lower electrode disposed parallel to each other in a reaction camber at a time T 1 after the plasma process begins in the reaction chamber; (ii) detecting a Vpp 2 between the upper electrode and the lower electrode at a time T 2 after T 1 ; (iii) comparing Vpp 1 and Vpp 2 to obtain an operation value; and (iv) determining abnormal operation if the operation value is within a predetermined range. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7638441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7632549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8082124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009068852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10043690-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010161278-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016293385-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111508818-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010104770-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009274851-A1 |
| priorityDate |
2005-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |