http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006270244-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ead4a340a314e2a5776c46b253ebddd8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe228c8b0f7327c99f912ac5f68e7f73 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31658 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b0f1265a04f6439f89f180def428dea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b92ff61b15ed9d1215cc7c038864626 |
| publicationDate | 2006-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2006270244-A1 |
| titleOfInvention | Method of fabricating a structure with an oxide layer of a desired thickness on a Ge or SiGe substrate |
| abstract | The present invention provides a method of forming a structure produced from semiconductor materials with the structure having a substrate layer and an insulating layer, and the method including the steps of creating the insulating layer involving constituting an oxidizable layer on the substrate layer and oxidizing the oxidizable layer. The method includes the steps of providing a thin elemental insulating layer at a mean thickness of 20 nm or less upon a substrate layer; providing an oxidizable layer upon the insulating layer; thermally oxidizing the oxidizable layer so that the combination of the oxidized oxidizable layer and the thin elemental insulating layer provides a desired thickness of the insulating layer of the structure. |
| priorityDate | 2005-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.