| abstract |
A method for making an integrated circuit. An area of dielectric material is formed on a substrate by hydrolyzing a plurality of precursors to form a hybrid organic inorganic material. One of the precursors is a compound R 1 R 2 R 3 SiR 4 , wherein R 1 , R 2 , R 3 are each independently aryl, a cross linkable group, or alkyl of 1-14 carbons, and wherein R 4 is alkoxy, acyloxy, —OH or halogen. Also disclosed is a method for forming a hybrid organic inorganic layer on a substrate by hydrolyzing a tetraalkoxysilane, trialkoxysilane, trichlorosilane, dialkoxysilane, or dichlorosilane, with R 1 R 2 R 4 MR 5 , wherein R 1 , R 2 and R 4 are independently aryl, alkyl, alkenyl, epoxy or alkynyl, at least one of R 1 , R 2 and R 4 is fully or partially fluorinated, M is selected from group 14 of the periodic table, and R 5 is either alkoxy, OR 3 wherein R 3 is alkyl of 1 to 10 carbons, or halogen. |